Simple fabrication method, which consists of two lithography and two etching processes, is utilized to construct woodpile photonic crystals in GaAs wafers. The developed resonator and waveguide designs enable 3-D optical integration in semiconductor wafer.
© 2009 OSA
(140.0140) Lasers and laser optics : Lasers and laser optics
(160.0160) Materials : Materials
(140.3945) Lasers and laser optics : Microcavities
(160.5293) Materials : Photonic bandgap materials
L. Tang and T. Yoshie, "On-Chip Woodpile Photonic Crystal for Light Localization and 3-D Integrated Optics," in Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest, OSA Technical Digest (CD) (Optical Society of America, 2009), paper FThU2.
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