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Conference Paper
Frontiers in Optics
San Jose, California United States
October 11-15, 2009
ISBN: 978-1-55752-878-0
FiO/LS Joint Poster Session (JWC)

Design and Fabrication of Multilayer Si/SiO<sup>2</sup>Super-High N.A. GRIN Lens for Nanowaveguide to Optical Fiber Coupling

Ter-Hoe Loh, Qian Wang, Keh-Ting Ng, Yingyan Huang, and Seng-Tiong Ho

http://dx.doi.org/10.1364/FIO.2009.JWC53


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Abstract

Compact multilayer Si/SiO<sup>2</sup>asymmetric GRIN lens (length:10~20?m) for vertical optical mode-size transformation from sub-0.5?m of nanowaveguide to ~10?m of single-mode-fiber, is proposed and designed. We report success in deposition and etching of 6~8?m multilayer Si/SiO<sup>2</sup>.

© 2009 OSA

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(250.0250) Optoelectronics : Optoelectronics
(250.3140) Optoelectronics : Integrated optoelectronic circuits

Citation
T. Loh, Q. Wang, K. Ng, Y. Huang, and S. Ho, "Design and Fabrication of Multilayer Si/SiO<sup>2</sup>Super-High N.A. GRIN Lens for Nanowaveguide to Optical Fiber Coupling," in Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest, OSA Technical Digest (CD) (Optical Society of America, 2009), paper JWC53.
http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2009-JWC53


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