Laser Fuse Processing for Advanced Memory Designs

Joohan Lee; James Cordingley

doi:10.1364/FIO.2010.STuA2

Frontiers in Optics 2010/Laser Science XXVI
OSA Technical Digest (CD) (Optica Publishing Group, 2010),
paper STuA2
•https://doi.org/10.1364/FIO.2010.STuA2

Laser Fuse Processing for Advanced Memory Designs

Joohan Lee and James Cordingley

Frontiers in Optics 2010

Rochester, New York United States
24–28 October 2010
ISBN:

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IPF-Laser Applications in Metrology (STuA)

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J. Lee and J. Cordingley, "Laser Fuse Processing for Advanced Memory Designs," in Frontiers in Optics 2010/Laser Science XXVI, OSA Technical Digest (CD) (Optica Publishing Group, 2010), paper STuA2.

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Abstract

Control of laser parameters such as wavelength, pulse shape, polarization, multiple pulses and ultra-short pulses improves the laser cutting reliability of various fine pitch fuses that are used for modern circuit redundancies.

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