Control of laser parameters such as wavelength, pulse shape, polarization, multiple pulses and ultra-short pulses improves the laser cutting reliability of various fine pitch fuses that are used for modern circuit redundancies.
(160.0160) Materials : Materials
(160.6000) Materials : Semiconductor materials
(350.0350) Other areas of optics : Other areas of optics
(350.3390) Other areas of optics : Laser materials processing
J. Lee and J. Cordingley, "Laser Fuse Processing for Advanced Memory Designs," in Frontiers in Optics 2010/Laser Science XXVI, OSA Technical Digest (CD) (Optical Society of America, 2010), paper STuA2.