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Conference Paper
Frontiers in Optics
Rochester, New York United States
October 24-28, 2010
IPF-Laser Applications in Metrology (STuA)

Laser Fuse Processing for Advanced Memory Designs

Joohan Lee and James Cordingley

http://dx.doi.org/10.1364/FIO.2010.STuA2


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Abstract

Control of laser parameters such as wavelength, pulse shape, polarization, multiple pulses and ultra-short pulses improves the laser cutting reliability of various fine pitch fuses that are used for modern circuit redundancies.

OCIS Codes
(160.0160) Materials : Materials
(160.6000) Materials : Semiconductor materials
(350.0350) Other areas of optics : Other areas of optics
(350.3390) Other areas of optics : Laser materials processing

Citation
J. Lee and J. Cordingley, "Laser Fuse Processing for Advanced Memory Designs," in Frontiers in Optics 2010/Laser Science XXVI, OSA Technical Digest (CD) (Optical Society of America, 2010), paper STuA2.
http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2010-STuA2

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