OSA's Digital Library

Optics InfoBase > Conference Papers > FiO > 2011 > FThO > Page FThO2 © 2011 OSA

Conference Paper
Frontiers in Optics
San Jose, California United States
October 16-20, 2011
ISBN: 978-1-55752-917-6
Hybrid and III-V Integrated Optics (FThO)

Fabrication of AlN-GaN-AlN sub-micron waveguide with cleaved facets

Vivek Krishnamurthy, Yijing Chen, Yicheng Lai, and Seng Tiong Ho  »View Author Affiliations


http://dx.doi.org/10.1364/FIO.2011.FThO2


View Full Text Article

Acrobat PDF (314 KB) Note that full-text PDFs from conferences typically contain 1-3 pages of content, some or all of which might be an abstract, summary, or miscellaneous items.





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

Sub-micron waveguide fabrication in AlN-GaN-AlN is demonstrated. Improvement to sidewall verticality and reduced nanorod defects through optimized etching parameters are highlighted. Dice-and-cleave approach is adopted to achieve good end-facets.

© 2011 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(220.4241) Optical design and fabrication : Nanostructure fabrication

Citation
V. Krishnamurthy, Y. Chen, Y. Lai, and S. T. Ho, "Fabrication of AlN-GaN-AlN sub-micron waveguide with cleaved facets," in Frontiers in Optics 2011/Laser Science XXVII, OSA Technical Digest (Optical Society of America, 2011), paper FThO2.
http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2011-FThO2


Sort:  Journal  |  Reset

References

References are not available for this paper.

OSA is a member of CrossRef.

CrossCheck Deposited