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Conference Paper
Frontiers in Optics
San Jose, California United States
October 16-20, 2011
ISBN: 978-1-55752-917-6
Hybrid and III-V Integrated Optics (FThO)

Fabrication of AlN-GaN-AlN sub-micron waveguide with cleaved facets

Vivek Krishnamurthy, Yijing Chen, Yicheng Lai, and Seng Tiong Ho  »View Author Affiliations


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Sub-micron waveguide fabrication in AlN-GaN-AlN is demonstrated. Improvement to sidewall verticality and reduced nanorod defects through optimized etching parameters are highlighted. Dice-and-cleave approach is adopted to achieve good end-facets.

© 2011 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(220.4241) Optical design and fabrication : Nanostructure fabrication

V. Krishnamurthy, Y. Chen, Y. Lai, and S. T. Ho, "Fabrication of AlN-GaN-AlN sub-micron waveguide with cleaved facets," in Frontiers in Optics 2011/Laser Science XXVII, OSA Technical Digest (Optical Society of America, 2011), paper FThO2.

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