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High Resolution Large Area Nanopatterning for Plasmonics and Metamaterials with Nanostencil Lithography

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Abstract

We demonstrate a versatile fabrication approach for high-resolution, large area patterning of optical antennas and metamaterials with reusable nanostencils. This technique offers simple and high-throughput fabrication scheme for any geometric design on variety of substrates.

© 2011 Optical Society of America

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