Abstract
We develop adaptive optics for 3D laser microfabrication. Correction of focal depth induced aberrations and beam shaping are applied to fabrication of photonic structures. Adaptive multispot schemes are used for rapid parallel fabrication.
© 2011 Optical Society of America
PDF ArticleMore Like This
P. S. Salter, A. Jesacher, H. Al-Wakeel, and M. J. Booth
AMC5 Adaptive Optics: Methods, Analysis and Applications (AO) 2011
Patrick Salter, Alexander Jesacher, Richard Simmonds, and Martin Booth
JMG1 CLEO: Applications and Technology (CLEO:A&T) 2011
Richard D. Simmonds, Alexander Jesacher, Tony Wilson, and Martin J. Booth
JMG2 CLEO: Applications and Technology (CLEO:A&T) 2011