Vertical mode size conversion from 300nmthick Siwaveguide to 6to7um, coupling to singlemode fiber was demonstrated using CMOS-compatible onchip GRIN lens (length:11.5um). GRIN lens to fiber coupling loss of 2.9dB was achieved.
© 2011 OSA
T. Loh, Q. Wang, K. Ng, Y. Lai, and S. Ho, "CMOS Compatible Integration of Si/SiO2 Multilayer GRIN Lens Optical Mode Size Converter to SOI-Based Waveguide," in Frontiers in Optics 2011/Laser Science XXVII, OSA Technical Digest (Optical Society of America, 2011), paper FWU1.
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