An interference projection exposure system is presented for single-exposure fabrication of low-spatial-frequency functional elements in a high-spatial-frequency, all-surrounding periodic pattern. Photonic crystal devices are demonstrated.
© 2011 OSA
G. M. Burrow and T. K. Gaylord, "Interference Projection Exposure System," in Frontiers in Optics 2011/Laser Science XXVII, OSA Technical Digest (Optical Society of America, 2011), paper FWZ2.
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