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Conference Paper
Frontiers in Optics
Rochester, New York United States
October 14-18, 2012
ISBN: 978-1-55752-956-5
CMOS Compatible Silicon Photonics (FTu2A)

Efficient Thermal Control of CMOS Compatible Silicon Photonic Devices using a Micro-Oven

Liang Cao, Abdelsalam A. Aboketaf, and Stefan Preble  »View Author Affiliations


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We propose an oven-shaped heater for efficient thermo-optic control of silicon photonic devices. The oven is simply realized using metal contacts in a standard CMOS process, yielding a high heating efficiency of ~95%.

© 2012 OSA

OCIS Codes
(060.1810) Fiber optics and optical communications : Buffers, couplers, routers, switches, and multiplexers
(230.3120) Optical devices : Integrated optics devices
(230.7370) Optical devices : Waveguides

L. Cao, A. A. Aboketaf, and S. Preble, "Efficient Thermal Control of CMOS Compatible Silicon Photonic Devices using a Micro-Oven," in Frontiers in Optics 2012/Laser Science XXVIII, OSA Technical Digest (online) (Optical Society of America, 2012), paper FTu2A.4.

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