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Design Considerations of Optically Actuated MEMS Deformable Mirror Device

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Abstract

In previous work, we reported on the design of a photosensitive, optically-actuated, deformable mirror. In this paper we theoretically analyze the actuation mechanism of this deformable mirror and determine the bias conditions under which the device suitably actuates under very low illumination.

© 2013 Optical Society of America

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