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Conference Paper
International Optical Design Conference
Tucson, Arizona United States
June 3, 2002
ISBN: 1-55752-714-8
Lithography Systems (IMD)

Microlithographic lens for DUV scanner

Tomoyuki Matsuyama and Yuichi Shibazaki


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No abstract available.

OCIS Codes
(110.3960) Imaging systems : Microlithography
(220.3630) Optical design and fabrication : Lenses

T. Matsuyama and Y. Shibazaki, "Microlithographic lens for DUV scanner," in International Optical Design Conference, 2002 OSA Technical Digest Series (Optical Society of America, 2002), paper IMD4.

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