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Conference Paper
International Optical Design Conference
Vancouver Canada
June 4, 2006
ISBN: 1-55752-811-X
Super Duper Poster Session Extravaganzia (ME)

Design of a Lens System for Micro Lens Lithography

Hamid R. Fallah and Ayatollah Karimzadeh


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Design details of a micro lens lithography system are discussed. This system contains three micro lens arrays with aspheric surfaces. We simulate and optimize this system with geometrical and diffraction-based methods using available software.

© 2006 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.2740) Optical design and fabrication : Geometric optical design
(220.3740) Optical design and fabrication : Lithography

H. R. Fallah and A. Karimzadeh, "Design of a Lens System for Micro Lens Lithography," in International Optical Design, Technical Digest (CD) (Optical Society of America, 2006), paper ME17.

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