Design details of a micro lens lithography system are discussed. This system contains three micro lens arrays with aspheric surfaces. We simulate and optimize this system with geometrical and diffraction-based methods using available software.
© 2006 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.2740) Optical design and fabrication : Geometric optical design
(220.3740) Optical design and fabrication : Lithography
H. R. Fallah and A. Karimzadeh, "Design of a Lens System for Micro Lens Lithography," in International Optical Design, Technical Digest (CD) (Optical Society of America, 2006), paper ME17.
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