We proposed a series of orthogonal aberration functions, which is suitable for a microlithographic projection lens. In this paper, general explanation and numbering of the orthogonal aberration functions are reviewed.
© 2006 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.1010) Optical design and fabrication : Aberrations (global)
(220.3740) Optical design and fabrication : Lithography
T. Matsuyama and T. Ujike, "Aberration Functions for Microlithographic Lens," in International Optical Design, Technical Digest (CD) (Optical Society of America, 2006), paper ME5.
References are not available for this paper.