OSA's Digital Library

Optics InfoBase > Conference Papers > IODC > 2006 > ME > Page ME5 © 2006 OSA

Conference Paper
International Optical Design Conference
Vancouver Canada
June 4, 2006
ISBN: 1-55752-811-X
Super Duper Poster Session Extravaganzia (ME)

Aberration Functions for Microlithographic Lens

Tomoyuki Matsuyama and Tomoko Ujike

http://dx.doi.org/10.1364/IODC.2006.ME5


View Full Text Article

Acrobat PDF (135 KB) Note that full-text PDFs from conferences typically contain 1-3 pages of content, some or all of which might be an abstract, summary, or miscellaneous items.





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

We proposed a series of orthogonal aberration functions, which is suitable for a microlithographic projection lens. In this paper, general explanation and numbering of the orthogonal aberration functions are reviewed.

© 2006 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.1010) Optical design and fabrication : Aberrations (global)
(220.3740) Optical design and fabrication : Lithography

Citation
T. Matsuyama and T. Ujike, "Aberration Functions for Microlithographic Lens," in International Optical Design, Technical Digest (CD) (Optical Society of America, 2006), paper ME5.
http://www.opticsinfobase.org/abstract.cfm?URI=IODC-2006-ME5


Sort:  Journal  |  Reset

References

References are not available for this paper.

OSA is a member of CrossRef.

CrossCheck Deposited