Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Designing Lithographic Objectives by Constructing Saddle Points

Not Accessible

Your library or personal account may give you access

Abstract

Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative that consists of constructing saddle points and obtaining local minima from them.

© 2006 Optical Society of America

PDF Article
More Like This
Obtaining Different Lens System Shapes by using Saddle-Point Construction

P. van Grol, M. van Turnhout, and F. Bociort
IW1A.3 International Optical Design Conference (IODC) 2014

Toward the Global Optimum in Lithographic Lens Design

Aurelian Dodoc
IWD3 International Optical Design Conference (IODC) 2010

The Optical Design for Microlithographic Lenses

Yasuhiro Ohmura
WD5 International Optical Design Conference (IODC) 2006

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved