Microscope objectives used for biaxial ellipsometry require small levels of polarization aberrations. The approach outlined in this paper allows the design and fabrication of microscope objectives with twelve times less diattenuation than commercially available objectives.
© 2010 OSA, SPIE
B. J. Daugherty and R. Chipman, "Low Polarization Microscope Objectives," in International Optical Design Conference and Optical Fabrication and Testing , OSA Technical Digest (CD) (Optical Society of America, 2010), paper IWA2.
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