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Conference Paper
Integrated Photonics and Nanophotonics Research and Applications
Honolulu, Hawaii United States
July 12-17, 2009
ISBN: 978-1-55752-873-5
Silicon Photonics and Hybrid Material Integrated Devices (IMC)

Enhancing Thermal Reconfiguration Speed for Silicon Photonics Applications

Amir H. Atabaki, Ali A. Eftekhar, Siva Yegnanarayanan, and Ali Adibi


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The reconfiguration speed of silicon photonic devices is enhanced by optimizing thin-film microheaters. We show theoretically and experimentally that narrower heaters, thinner buried oxide layers, and LPCVD SiN over-cladding can improve the reconfiguration speed.

© 2009 OSA

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(160.0160) Materials : Materials
(160.6840) Materials : Thermo-optical materials

A. H. Atabaki, A. A. Eftekhar, S. Yegnanarayanan, and A. Adibi, "Enhancing Thermal Reconfiguration Speed for Silicon Photonics Applications," in Advances in Optical Sciences Congress, OSA Technical Digest (CD) (Optical Society of America, 2009), paper IMC3.

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