The reconfiguration speed of silicon photonic devices is enhanced by optimizing thin-film microheaters. We show theoretically and experimentally that narrower heaters, thinner buried oxide layers, and LPCVD SiN over-cladding can improve the reconfiguration speed.
© 2009 OSA
A. H. Atabaki, A. A. Eftekhar, S. Yegnanarayanan, and A. Adibi, "Enhancing Thermal Reconfiguration Speed for Silicon Photonics Applications," in Advances in Optical Sciences Congress, OSA Technical Digest (CD) (Optical Society of America, 2009), paper IMC3.
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