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Low-Voltage, Vertical-Junction, Depletion-Mode, Silicon Mach-Zehnder Modulator with Complementary Outputs

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Abstract

We demonstrate a new silicon depletion-mode vertical p-n junction phase-modulator implemented in a lumped-element Mach-Zehnder modulator configuration enabling an ultra-low VπL of ~1V⋅cm and 10Gb/s non-return-to-zero (NRZ) data transmission with wide-open complementary output eye diagrams.

© 2009 Optical Society of America

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