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THE EXPERIMENTAL AND THEORETICAL STUDY OF SCATTERING LOSSES IN Si/SiO2 WAVEGUIDES

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Abstract

CMOS-compatible, sub-micron Si/SiO2 waveguides are experimentally and theoretically studied for the effect of size and sidewall roughness on transmission losses. The loss contour map constructed from this study can be used for optimal waveguide design.

© 2000 Optical Society of America

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