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A New Simple Process for Optical Mode Converter Integration with Active and Passive Waveguides in InGaAsP/InP

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Abstract

Optical mode converters can significantly lower the coupling loss and simplify packaging of next generation optoelectronic devices. A new process which reduces the number of MOCVD regrowths required for integration of mode shape converters with active and passive waveguides is presented. A new wet etchant was effectively used in fabrication.

© 2001 Optical Society of America

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