We have developed writing techniques for grayscale masks that we utilize in the fabrication of tapered coupling devices. These devices provide efficient coupling into optical circuits as compared to presently employed methods. We discuss mask process development, fabrication techniques, and device performance.
© 2003 Optical Society of America
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(230.0230) Optical devices : Optical devices
(230.4000) Optical devices : Microstructure fabrication
T. E. Dillon, A. Balcha, J. Murakowski, and D. W. Prather, "Three-dimensionally profiled optical couplers fabricated by grayscale lithography," in Integrated Photonics Research, A. Sawchuk, ed., Vol. 91 of OSA Trends in Optics and Photonics (Optical Society of America, 2003), paper ITuH7.
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