OSA's Digital Library

Optics InfoBase > Conference Papers > IPR > 2003 > ITuH > Page ITuH7 © 2003 OSA

Conference Paper
Integrated Photonics Research
Washington, D.C. United States
June 15, 2003
ISBN: 1-55752-751-2
IPR Poster Session (ITuH)

Three-dimensionally profiled optical couplers fabricated by grayscale lithography

Thomas E. Dillon, Anita Balcha, Janusz Murakowski, and Dennis W. Prather


View Full Text Article

Acrobat PDF (496 KB) Note that full-text PDFs from conferences typically contain 1-3 pages of content, some or all of which might be an abstract, summary, or miscellaneous items.

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


We have developed writing techniques for grayscale masks that we utilize in the fabrication of tapered coupling devices. These devices provide efficient coupling into optical circuits as compared to presently employed methods. We discuss mask process development, fabrication techniques, and device performance.

© 2003 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(230.0230) Optical devices : Optical devices
(230.4000) Optical devices : Microstructure fabrication

T. E. Dillon, A. Balcha, J. Murakowski, and D. W. Prather, "Three-dimensionally profiled optical couplers fabricated by grayscale lithography," in Integrated Photonics Research, A. Sawchuk, ed., Vol. 91 of OSA Trends in Optics and Photonics (Optical Society of America, 2003), paper ITuH7.

Sort:  Journal  |  Reset


References are not available for this paper.

OSA is a member of CrossRef.

CrossCheck Deposited