Microring resonators fabricated in silica-on-silicon technology using deep glass etching are demonstrated. The fabrication procedures are introduced and the transmission spectrum of a resonator is presented.
© 2006 Optical Society of America
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
H. Ou, K. Rottwitt, and H. Philipp, "Novel Deep Glass Etched Microring Resonators Based on Silica-on-Silicon Technology," in Integrated Photonics Research and Applications/Nanophotonics, Technical Digest (CD) (Optical Society of America, 2006), paper IMB4.
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