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Conference Paper
Integrated Photonics Research and Applications
Uncasville, Connecticut
April 24, 2006
Joint Session on Frontiers in Ultrasmall Photonic Devices (JWA)

Fabrication Control of the Resonance Frequencies of High-Index-Contrast Microphotonic Cavities

Tymon Barwicz, Milos A. Popovic, Peter T. Rakich, Michael R. Watts, Franz X. Kaertner, Erich P. Ippen, and Henry I. Smith


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Microphotonic filters require precise control of the relative resonance frequencies of integrated dielectric micro-cavities. Using high-index-contrast microring resonators, we present, demonstrate, and analyze techniques allowing small and accurate corrections of resonance frequencies at fabrication.

© 2006 Optical Society of America

OCIS Codes
(230.0230) Optical devices : Optical devices
(230.3120) Optical devices : Integrated optics devices
(230.4000) Optical devices : Microstructure fabrication

T. Barwicz, M. A. Popovic, P. T. Rakich, M. R. Watts, F. X. Kaertner, E. P. Ippen, and H. I. Smith, "Fabrication Control of the Resonance Frequencies of High-Index-Contrast Microphotonic Cavities," in Integrated Photonics Research and Applications/Nanophotonics, Technical Digest (CD) (Optical Society of America, 2006), paper JWA3.

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