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Conference Paper
Integrated Photonics Research, Silicon and Nanophotonics
Toronto Canada
June 12-15, 2011
ISBN: 978-1-55752-913-8
Nanophotonics: Waveguides, Optomechanics, and SOI-based Technologies (IMB)

Theoretical Investigation of CMOS-Compatible Metal-Oxide-Silicon-Oxide-Metal Waveguides

Min-Suk Kwon  »View Author Affiliations


http://dx.doi.org/10.1364/IPRSN.2011.IMB4


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Abstract

We propose a metal-oxide-silicon-oxide-metal (MOSOM) waveguide that is a hybrid plasmonic waveguide, and we discuss its fabrication process based on standard CMOS fabrication tools. Its characteristics are theoretically investigated and explained.

© 2011 OSA

OCIS Codes
(130.2790) Integrated optics : Guided waves
(240.6680) Optics at surfaces : Surface plasmons
(250.5403) Optoelectronics : Plasmonics

Citation
M. Kwon, "Theoretical Investigation of CMOS-Compatible Metal-Oxide-Silicon-Oxide-Metal Waveguides," in Advanced Photonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB4.
http://www.opticsinfobase.org/abstract.cfm?URI=IPRSN-2011-IMB4

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