We present a waveguide photodetector design for weak absorbers, such as ion-implanted silicon and polysilicon, utilizing a critically-coupled 1D photonic crystal cavity. Device lengths of < 15 µm can be achieved if scattering loss is managed.
© 2012 OSA
R. R. Grote, J. B. Driscoll, N. C. Panoiu, and R. M. Osgood, "Ultra-Compact Silicon Waveguide Photodetectors Utilizing Critically-Coupled Photonic Crystal Cavities at 1.55 µm," in Advanced Photonics Congress, OSA Technical Digest (online) (Optical Society of America, 2012), paper IW3C.6.