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Conference Paper
International Quantum Electronics Conference
San Francisco, California United States
May 16, 2004
ISBN: 1-55752-770-9
Lattice Dynamics and Phonons (IMJ)

Nanostructure imaging with sub-THz coherent acoustic phonon pulses

Brian C. Daly, Niels C. Holme, Cyril Branciard, Theodore B. Norris, Stanley Pau, Donald M. Tennant, Joseph A. Taylor, and John E. Bower

http://dx.doi.org/10.1364/IQEC.2004.IMJ7


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Abstract

We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown.

© 2004 Optical Society of America

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(110.7170) Imaging systems : Ultrasound
(320.0320) Ultrafast optics : Ultrafast optics
(320.7150) Ultrafast optics : Ultrafast spectroscopy

Citation
B. C. Daly, N. C. Holme, C. Branciard, T. B. Norris, S. Pau, D. M. Tennant, J. A. Taylor, and J. E. Bower, "Nanostructure imaging with sub-THz coherent acoustic phonon pulses," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper IMJ7.
http://www.opticsinfobase.org/abstract.cfm?URI=IQEC-2004-IMJ7


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