We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown.
© 2004 Optical Society of America
B. C. Daly, N. C. Holme, C. Branciard, T. B. Norris, S. Pau, D. M. Tennant, J. A. Taylor, and J. E. Bower, "Nanostructure imaging with sub-THz coherent acoustic phonon pulses," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper IMJ7.
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