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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper IWA28
  • https://doi.org/10.1364/IQEC.2004.IWA28

Nano-photolithography using a visible light based on the nonadiabatic near-field photochemical reaction

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Abstract

We applied nonadiabatic near-field photochemical reaction to the photolithography. The optical near field with the steep spatial gradient of optical power activates the unique photochemical reaction and enables nanometric patterning even by using visible light.

© 2004 Optical Society of America

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