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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper JMD6

Damage of Sc/Si multilayer mirrors exposed to intense nanosecond 46.9 nm laser pulses

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Abstract

The damage threshold fluence (~ 0.08 J/cm2) and damage mechanism of extreme ultraviolet Sc/Si multilayer coatings irradiated by 46.9 nm laser pulses of nanosecond duration are reported.

© 2004 Optical Society of America

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