The damage threshold fluence (~ 0.08 J/cm2) and damage mechanism of extreme ultraviolet Sc/Si multilayer coatings irradiated by 46.9 nm laser pulses of nanosecond duration are reported.
© 2004 Optical Society of America
G. Vaschenko, M. Grisham, C. S. Menoni, J. J. Rocca, Y. P. Pershyn, E. N. Zubarev, D. L. Voronov, V. A. Sevryukova, V. V. Kondratenko, A. V. Vinogradov, and I. A. Artioukov, "Damage of Sc/Si multilayer mirrors exposed to intense nanosecond 46.9 nm laser pulses," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper JMD6.
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