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SIM and Deflectometry: New Tools to Acquire Beautiful, SEM-like 3D Images

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Abstract

Structured-illumination microscopy and microdeflectometry acquire the shape of microscopic objects with a noise level down to 1 nanometer, a depth of field 100 times larger than the Rayleigh depth, and slope angles up to 80 degrees. This paper discusses the fundamental physical and information-theoretical limits and chances of the methods which are crucial for accurate, information-efficient, and fast 3D measurements.

© 2011 Optical Society of America

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