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Pit Shape Dependence of Super-RENS ROM Disc

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Abstract

We propose a fabrication method of Super-RENS ROM disc using thermal lithography by platinum oxidize (PtOx) thermal decomposition. The smallest pit size was 50 nm when the optical writer with an objective lens of NA:0.65 and wavelength of 405 nm was used. It was found that a pit with a large area shows a high CNR. The pit shape dependence was also investigated by fabricating elliptical pits. It was confirmed that the CNR can be improved by 7dB.

© 2005 Optical Society of America

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