Micromachined sieves structures were manufactured to be used as thin microaperture system for localized induction of DNA damage in living cells using ultra-soft X-rays. The lithography fabrication of such structures is described in this paper.
© 2010 The Optical Society
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3890) Instrumentation, measurement, and metrology : Medical optics instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
A. M. Melo, A. Gobbi, P. M. Krawczyk, J. Stap, M. H. O. Piazzetta, and E. C. Bortolucci, "Micromachined Structures Used in DNA Damages Response Studies," in Latin America Optics and Photonics Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper MB07.
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