Photorefractive reflection holography compound microscope for MEMS characterization

M. S. Ferreira; E. A. Barbosa

doi:10.1364/LAOP.2012.LT3C.2

Latin America Optics and Photonics Conference
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper LT3C.2
•https://doi.org/10.1364/LAOP.2012.LT3C.2

Photorefractive reflection holography compound microscope for MEMS characterization

M. S. Ferreira and E. A. Barbosa

Latin America Optics and Photonics Conference 2012

Sao Sebastiao Brazil
10–13 November 2012
ISBN: 978-1-55752-9589

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Interferometry and Optical Characterization (LT3C)

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M. S. Ferreira and E. A. Barbosa, "Photorefractive reflection holography compound microscope for MEMS characterization," in Latin America Optics and Photonics Conference, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper LT3C.2.

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Abstract

This work describes a reflection holography microscope setup based on sillenite photorefractive crystals and illuminated by a diode laser. The resulting compound microscope has shown to be suitable for MEMs characterization through holographic interferometry.

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