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3D Stabilization of an Optical Microscope to 0.1 nm at 1 Hz using an Array of Nano-Posts

Ashley R. Carter, Gavin M. King, Theresa A. Ulrich, Wayne A. Halsey, and Thomas T. Perkins

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Abstract

We extended differential back-focal-plane detection to measure vertical motion. We achieved sub-nanometer vertical motion by intensity-stabilizing our detector laser and differentially amplifying the vertical signal. This process is enhanced by using nanoposts as fiducial marks.

© 2005 Optical Society of America

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