A constructed-aperture approach is proposed to measure marginal roughness by far-field irradiance. It is numerically shown that spatial profile could be retrieved with an error less than 3%, even its variation is in subwavelength scale.
© 2006 Optical Society of America
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1940) Diffraction and gratings : Diffraction
(070.0070) Fourier optics and signal processing : Fourier optics and signal processing
(070.2580) Fourier optics and signal processing : Paraxial wave optics
J. Chern and S. Chu, "Characterization of Subwavelength-Scale Marginal Roughness from Far-Field Irradiance," in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2006), paper JSuA38.
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