Excitation means of whispering gallery modes in nanosized silicon triangular resonators is studied. Nanosphere lithography technique with self-assembled polystyrene spheres as shadow masks is used for fabricating periodic arrays of nanosized silicon resonators.
© 2007 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.0230) Optical devices : Optical devices
(230.3990) Optical devices : Micro-optical devices
A. Grunin, V. V. Moskalenko, I. V. Soboleva, A. A. Fedyanin, C. -. M. Lai, and L. -. H. Peng, "Whispering Gallery Modes in Nanosized Silicon Triangular Resonators Fabricated Using Nanosphere Lithography," in Frontiers in Optics 2007/Laser Science XXIII/Organic Materials and Devices for Displays and Energy Conversion, OSA Technical Digest (CD) (Optical Society of America, 2007), paper JSuA42.
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