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  • Frontiers in Optics 2007/Laser Science XXIII/Organic Materials and Devices for Displays and Energy Conversion
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper LWJ6
  • https://doi.org/10.1364/LS.2007.LWJ6

Analysis and Fabrication of Fabry-Perot Interferometer Filters Using MEMS Technology

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Abstract

The Fabry-Perot Interferometer (FPI) filters with phase reduction have been thoroughly analyzed and fabricated using micro electromechanical systems (MEMS) technology. The main advantages of these filters used for communication or sensing applications are: small power requirements, higher sensitivity and stability.

© 2007 APS

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