Lossy dielectric polarizers have been designed for use with 193nm light. These polarizers have the possibility for polarization based subresolution assist. Through numerical simulation, transmission and reflection coefficients have been found.
© 2008 The Optical Society
(050.0050) Diffraction and gratings : Diffraction and gratings
(260.0260) Physical optics : Physical optics
(260.5430) Physical optics : Polarization
(050.6624) Diffraction and gratings : Subwavelength structures
M. J. Theisen and T. G. Brown, "Lossy Dielectric Polarizers for Polarization Based Subresolution Assist," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JSuA17.
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