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Conference Paper
Laser Science
Rochester, New York United States
October 19-23, 2008
ISBN: 978-1-55752-861-2
Joint FiO/LS Poster Session I (JSuA)

SiO2/HfO2Multilayers: Impact of Process Parameters and Stack Geometry on the Optical and Structural Properties

Peter Langston, Dinesh Patel, Ashot Markosyan, Erik Krous, Benjamin Langdon, R Route, M Fejer, and Carmen Menoni

http://dx.doi.org/10.1364/FIO.2008.JSuA27


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Abstract

Loss, stress and surface roughness in ion-beam deposition of HfO2/SiO2interference coatings are assessed for different growth conditions to understand how to improve the performance of these coatings for high power laser applications.

© 2008 The Optical Society

OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(310.0310) Thin films : Thin films
(310.4165) Thin films : Multilayer design

Citation
P. Langston, D. Patel, A. Markosyan, E. Krous, B. Langdon, R. Route, M. Fejer, and C. Menoni, "SiO2/HfO2Multilayers: Impact of Process Parameters and Stack Geometry on the Optical and Structural Properties," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JSuA27.
http://www.opticsinfobase.org/abstract.cfm?URI=LS-2008-JSuA27


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