Nano-optomechanical circuits on silicon substrates

Xiankai Sun; Chi Xiong; Kingyan Fong; Xufeng Sun; Hong X. Tang

doi:10.1364/LS.2012.LW5J.3

Frontiers in Optics 2012/Laser Science XXVIII
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper LW5J.3
•https://doi.org/10.1364/LS.2012.LW5J.3

Nano-optomechanical circuits on silicon substrates

Xiankai Sun, Chi Xiong, Kingyan Fong, Xufeng Sun, and Hong X. Tang

Laser Science 2012

Rochester, New York United States
14–18 October 2012
ISBN: 978-1-55752-956-5

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Nano-Opto-Mechanics II (LW5J)

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X. Sun, C. Xiong, K. Fong, X. Sun, and H. X. Tang, "Nano-optomechanical circuits on silicon substrates," in Frontiers in Optics 2012/Laser Science XXVIII, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper LW5J.3.

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Abstract

We present our most recent progresses in developing nano-optomechanical circuits on silicon substrates. Through active coupling of NEMS with high Q cavities, we demonstrate further scaling of NEMS in size, sensitivity, frequency and damping rate.

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