Abstract
We report on soft and hard molding processes based on one- and two-photon microfabrication. The soft molding process allows us to replicate complicated three-dimensional (3-D) microstructures produced by two-photon microfabrication simply by injecting a photopolymer into a polydimethylsiloxane (PDMS) mold and then curing it. Even freely movable microstructures such as microgears and microtweezers can be reproduced. In the hard molding process, a polymeric 3-D microstructure produced by laser direct writing is transferred to a ceramics 3-D microstrcture with high-concentration slurry containing ceramics nanoparticles. We have already fabricated several kinds of ceramic microdevices such as 3-D microchannel, 3-D scaffolds and piezoelectric energy harvesters. The soft and hard molding processes based on 3-D laser microfabrication will be useful for the mass production of various types of practical microdevices using ceramic materials.
© 2012 Optical Society of America
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