Super-resolution imaging has been achieved in a lithography environment using both single- and multi-layer silver superlenses. The performance of these systems is compared here, and analytical and simulation methods are used to optimise performance.
© 2005 Optical Society of America
R. J. Blaikie, "Super-Resolution Imaging and Performance Optimisation for Single- and Multi-Layer Silver Superlenses," in Photonic Metamaterials: From Random to Periodic, Technical Dgest (CD) (Optical Society of America, 2006), paper TuC1.
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