Ion beam figuring of strongly curved surfaces using small spot beam and a three linear axes motion system and taking the ion incidence etch rate dependence into account in the process modeling has been developed.
© 2008 The Optical Society
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(350.0350) Other areas of optics : Other areas of optics
(350.3850) Other areas of optics : Materials processing
T. Haensel, A. Nickel, and A. Schindler, "Ion Beam Figuring of Strongly Curved Surfaces with a (X, Y, Z) Linear Three-Axes System," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JWD6.
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