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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper JWD6
  • https://doi.org/10.1364/OFT.2008.JWD6

Ion beam figuring of strongly curved surfaces with a (x, y, z) linear three-axes system

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Abstract

Ion beam figuring of strongly curved surfaces using small spot beam and a three linear axes motion system and taking the ion incidence etch rate dependence into account in the process modeling has been developed.

© 2008 Optical Society of America

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