Abstract
Ion beam figuring of strongly curved surfaces using small spot beam and a three linear axes motion system and taking the ion incidence etch rate dependence into account in the process modeling has been developed.
© 2008 Optical Society of America
PDF ArticleMore Like This
T. Franz and T. Hänsel
OThC7 Optical Fabrication and Testing (OF&T) 2008
A. Schindler, T. Hänsel, F. Frost, R. Fechner, G. Seidenkranz, A. Nickel, H.-J. Thomas, H. Neumann, D. Hirsch, R. Schwabe, G. Seidenkranz, and K. Barucki
OTuB5 Optical Fabrication and Testing (OF&T) 2002
T. Hänsel, A. Nickel, A. Schindler, and H.-J. Thomas
OMD5 Optical Fabrication and Testing (OF&T) 2004