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Linearized Gimbal-less Two-Axis MEMS Mirrors

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Abstract

Gimbal-less Two-Axis Scanning MEMS Mirrors provide ultra low-power and fast optical beam scanning at angles of up to 32° in both axes, while dissipating less than 1 mW of power. Linearized driving scheme and 4-quadrant addressable electrostatic combdrive design gives nearly linear voltage-angle characteristics. Devices are made entirely of single-crystal silicon, resulting in excellent repeatability and reliability. Mirrors from 1mm to 4mm allow users to optimize in their application.

© 2009 Optical Society of America

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