Digital Holography for MEMS Application

Anand Asundi; Vijay Raj Singh

doi:10.1364/DH.2009.JTuA2

Advances in Imaging
OSA Technical Digest (CD) (Optica Publishing Group, 2009),
paper JTuA2
•https://doi.org/10.1364/DH.2009.JTuA2

Digital Holography for MEMS Application

Anand Asundi and Vijay Raj Singh

Novel Techniques in Microscopy 2009

Vancouver Canada
26–30 April 2009
ISBN: 978-1-55752-871-1

From the session
DH/NTM Joint Session: Digital Holographic Microscopy (JTuA)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
A. Asundi and V. R. Singh, "Digital Holography for MEMS Application," in Advances in Imaging, OSA Technical Digest (CD) (Optica Publishing Group, 2009), paper JTuA2.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

Studies on digital holographic microscopy system for full-field high resolution 3D profiling of MEMS and micro-devices are presented in this paper. Applications of the system for thickness measurements of thin film and analysis of accelerometer device are presented.

PDF Article

More Like This

Principles and Applications of Phase-shifting Digital Holography

Ichirou Yamaguchi
DMA1 Digital Holography and Three-Dimensional Imaging (DH) 2009

Application of Digital Micro-mirror Devices to Spherical Reference Beam Digital In-line Holography

Adekunle A. Adeyemi and Thomas E. Darcie
DMA5 Digital Holography and Three-Dimensional Imaging (DH) 2009

Three-Wavelength Phase Imaging Digital Holography of MEMS Motion

Christopher J. Mann, Philip R. Bingham, and Kenneth W. Tobin
DTuC4 Digital Holography and Three-Dimensional Imaging (DH) 2008

Previous Article Next Article