Fabrication of trenches across silica on silicon waveguides is demonstrated. These are etched deep into the substrate and their widths are varied between 24 and 100 µm. Measurements and predictions of insertion loss are shown.
© 2004 Optical Society of America
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
H. Ou and K. Rottwitt, " Trenches for building blocks of advanced planar components," in Optical Amplifiers and Their Applications/Integrated Photonics Research, Technical Digest (CD) (Optical Society of America, 2004), paper JWB29.
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