Microresonators, while difficult to fabricate, present significant opportunity for photonic integration. We present a material set/fabrication process to produce high precision resonator structures and integrate them with CMOS silicon devices for ultra-dense optical chip interconnect.
© 2003 Optical Society of America
R. M. Kubacki, "Microresonator fabrication and integration for high density chip to chip optical interconnect," in Optics in Computing, A. Sawchuk, ed., Vol. 90 of OSA Trends in Optics and Photonics (Optical Society of America, 2003), paper JWC4.
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