A NA 0.65 microlens fabricated by focused ion beam milling in the silicon nitride film on a silicon substrate is presented. The measured NA is 0.64 and the focused spot size is 0.64 μm.
© 2007 OSA
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.0350) Other areas of optics : Other areas of optics
(350.3950) Other areas of optics : Micro-optics
Y. Chiu, C. Huang, and Y. Hsu, " High Numerical-Aperture Microlens Fabricated by Focused Ion Beam Milling," in Optical Data Storage, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper MC6.
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