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Conference Paper
Optical Data Storage
Portland, Oregon United States
May 20, 2007
ISBN: 1-55752-840-3
Components and Testing (MC)

High Numerical-Aperture Microlens Fabricated by Focused Ion Beam Milling

Yi Chiu, Chien-Hsun Huang, and Ying-Chien Hsu

http://dx.doi.org/10.1364/ODS.2007.MC6


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Abstract

A NA 0.65 microlens fabricated by focused ion beam milling in the silicon nitride film on a silicon substrate is presented. The measured NA is 0.64 and the focused spot size is 0.64 μm.

© 2007 OSA

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.0350) Other areas of optics : Other areas of optics
(350.3950) Other areas of optics : Micro-optics

Citation
Y. Chiu, C. Huang, and Y. Hsu, " High Numerical-Aperture Microlens Fabricated by Focused Ion Beam Milling," in Optical Data Storage, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper MC6.
http://www.opticsinfobase.org/abstract.cfm?URI=ODS-2007-MC6


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