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Conference Paper
Optical Fiber Communication Conference
Atlanta, Georgia United States
March 23, 2003
ISBN: 1-55752-731-8
Wavelength Multiplexing and Switching (TuN)

A Surface and Bulk Micromachined Angular Vertical Combdrive for Scanning Micromirrors

Wibool Piyawattanametha, Pamela R. Patterson, Dooyoung Hah, Hiroshi Toshiyoshi, and Ming C. Wu

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We present a high performance scanning micromirror with angular vertical comb actuators realized by combining MUMPs with a 3-mask deep-reactive-ion-etching post process. A DC scan angle of ±4° (mechanical) is achieved at 40V.

© 2003 Optical Society of America

OCIS Codes
(230.0230) Optical devices : Optical devices
(230.3990) Optical devices : Micro-optical devices
(230.4040) Optical devices : Mirrors

W. Piyawattanametha, P. R. Patterson, D. Hah, H. Toshiyoshi, and M. C. Wu, "A Surface and Bulk Micromachined Angular Vertical Combdrive for Scanning Micromirrors," in Optical Fiber Communication Conference, Technical Digest (Optical Society of America, 2003), paper TuN1.

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