We demonstrate full closed-loop control of electrostatically actuated double-gimbaled MEMS mirrors and use them in a free space optical crossconnect with switching times of less than 10ms, and optical power stability of better than 0.2 dB.
© 2003 Optical Society of America
(060.0060) Fiber optics and optical communications : Fiber optics and optical communications
(060.1810) Fiber optics and optical communications : Buffers, couplers, routers, switches, and multiplexers
(130.0130) Integrated optics : Integrated optics
(130.0250) Integrated optics : Optoelectronics
I. Brener, P. B. Chu, M. Tsai, C. Pu, M. Chou, J. I. Dadap, D. C. Lee, B. Tang, D. Peale, N. Bonadeo, R. Harel, C. Wu, J. Johnson, S. Park, S. Lee, D. Tong, R. Doran, K. Bergman, T. Chau, E. Goldstein, L. Lin, J. A. Walker, W. Zhong, and R. Gibson, "Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch," in Optical Fiber Communication Conference, Technical Digest (Optical Society of America, 2003), paper WM1.
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