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Conference Paper
Optical Fiber Communication Conference
Atlanta, Georgia United States
March 23, 2003
ISBN: 1-55752-731-8
Optical MEMS Components (WM)

Ultra-Compact Multichannel Optical Components Based on PLC and MEMS Technologies

Tomohiko Kanie, Makoto Katayama, Tomomi Sano, Hiroshi Kohda, Takahiro Sunaga, Manabu Shiozaki, Masato Furukawa, Hiroshi Suganuma, Kazuhito Saitoh, and Masayuki Nishimura

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Abstract

We propose multichannel optical components based on PLC and MEMS technologies. 12 channel optical switch arrays and VOA arrays have been successfully developed by integrating 2x2 cross type waveguides and MEMS micro-mirrors connected together by flip chip bonding.

© 2003 Optical Society of America

OCIS Codes
(060.0060) Fiber optics and optical communications : Fiber optics and optical communications
(060.2340) Fiber optics and optical communications : Fiber optics components
(230.0230) Optical devices : Optical devices
(230.3990) Optical devices : Micro-optical devices

Citation
T. Kanie, M. Katayama, T. Sano, H. Kohda, T. Sunaga, M. Shiozaki, M. Furukawa, H. Suganuma, K. Saitoh, and M. Nishimura, "Ultra-Compact Multichannel Optical Components Based on PLC and MEMS Technologies," in Optical Fiber Communication Conference, Technical Digest (Optical Society of America, 2003), paper WM4.
http://www.opticsinfobase.org/abstract.cfm?URI=OFC-2003-WM4


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