Internal stress simulation of a multilayer structure using measured wafer curvature accurately predicts the central wavelength shifts and spectrum ripple resulting from grinding and temperature change, thereby greatly improving the production yield of 50GHz filters.
© 2004 Optical Society of America
(060.0060) Fiber optics and optical communications : Fiber optics and optical communications
(060.2340) Fiber optics and optical communications : Fiber optics components
(310.0310) Thin films : Thin films
(310.6870) Thin films : Thin films, other properties
J. J. Pan, J. Jiang, F. Q. Zhou, and J. Guo, "A complete internal mechanical stress analysis of multilayer composite leads to optimized coating process control for 50GHz thin film filters," in Optical Fiber Communication Conference, Technical Digest (CD) (Optical Society of America, 2004), paper MF30.
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